Measuring of the Thickness of Thin Films with the Use of Harmonic Antisymmetric Lamb Waves
- Авторлар: Tolipov K.1
-
Мекемелер:
- South-Ural State University (National Research University)
- Шығарылым: Том 61, № 6 (2018)
- Беттер: 639-642
- Бөлім: Acoustic Measurements
- URL: https://journals.rcsi.science/0543-1972/article/view/246522
- DOI: https://doi.org/10.1007/s11018-018-1477-3
- ID: 246522
Дәйексөз келтіру
Аннотация
We propose a method for measuring the micrometer-range thicknesses of thin films with the use of acoustic waves. The method is based on the use of the nonlinear dependence of antisymmetric harmonic Lamb waves on the thickness of the tested material. The errors of measurements of the thickness of thin films are analyzed with the help of a contactless electromagnetoacoustic transducer of acoustic waves.
Авторлар туралы
Kh. Tolipov
South-Ural State University (National Research University)
Хат алмасуға жауапты Автор.
Email: tolipovkb@susu.ru
Ресей, Chelyabinsk