Measuring of the Thickness of Thin Films with the Use of Harmonic Antisymmetric Lamb Waves
- 作者: Tolipov K.1
-
隶属关系:
- South-Ural State University (National Research University)
- 期: 卷 61, 编号 6 (2018)
- 页面: 639-642
- 栏目: Acoustic Measurements
- URL: https://journals.rcsi.science/0543-1972/article/view/246522
- DOI: https://doi.org/10.1007/s11018-018-1477-3
- ID: 246522
如何引用文章
详细
We propose a method for measuring the micrometer-range thicknesses of thin films with the use of acoustic waves. The method is based on the use of the nonlinear dependence of antisymmetric harmonic Lamb waves on the thickness of the tested material. The errors of measurements of the thickness of thin films are analyzed with the help of a contactless electromagnetoacoustic transducer of acoustic waves.
作者简介
Kh. Tolipov
South-Ural State University (National Research University)
编辑信件的主要联系方式.
Email: tolipovkb@susu.ru
俄罗斯联邦, Chelyabinsk