Email this article Measuring of the Thickness of Thin Films with the Use of Harmonic Antisymmetric Lamb Waves
- Authors: Tolipov K.B.1
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Affiliations:
- South-Ural State University (National Research University)
- Issue: Vol 61, No 6 (2018)
- Pages: 639-642
- Section: Acoustic Measurements
- URL: https://journals.rcsi.science/0543-1972/article/view/246522
- DOI: https://doi.org/10.1007/s11018-018-1477-3
- ID: 246522
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Abstract
We propose a method for measuring the micrometer-range thicknesses of thin films with the use of acoustic waves. The method is based on the use of the nonlinear dependence of antisymmetric harmonic Lamb waves on the thickness of the tested material. The errors of measurements of the thickness of thin films are analyzed with the help of a contactless electromagnetoacoustic transducer of acoustic waves.
About the authors
Kh. B. Tolipov
South-Ural State University (National Research University)
Author for correspondence.
Email: tolipovkb@susu.ru
Russian Federation, Chelyabinsk
