Email this article Measurement of the Height of Nanorelief Elements by the Method of Three-Dimensional Reconstruction in a Scanning Electron Microscope
- Authors: Darznek S.A.1, Karabanov D.A.1, Kuzin A.Y.2, Mityukhlyaev V.B.1, Todua P.A.1,3, Filippov M.N.1,3,4
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Affiliations:
- Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
- All-Russia Research Institute of Metrological Service (VNIIMS)
- Moscow Institute of Physics and Technology (State University)
- Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IGIC RAS)
- Issue: Vol 60, No 3 (2017)
- Pages: 220-225
- Section: Article
- URL: https://journals.rcsi.science/0543-1972/article/view/246100
- DOI: https://doi.org/10.1007/s11018-017-1177-4
- ID: 246100
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Abstract
Comparative measurements of the height of the nanorelief steps of the surface of a silicon wafer by methods of three-dimensional reconstruction using a scanning electron microscope and profilometry were carried out. To realize the method of three-dimensional reconstruction, an islet gold film is formed on the surface of the test sample. The AlphaStep D-600 profiler is calibrated with a KTS-4500 QS step height gauge. The coincidence of the results of measurements with the methods of three-dimensional reconstruction and profilometry is established. The possibilities of reducing the uncertainty of the measurement results by the method of three-dimensional reconstruction were analyzed.
About the authors
S. A. Darznek
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Author for correspondence.
Email: fgupnicpv@mail.ru
Russian Federation, Moscow
D. A. Karabanov
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Email: fgupnicpv@mail.ru
Russian Federation, Moscow
A. Yu. Kuzin
All-Russia Research Institute of Metrological Service (VNIIMS)
Email: fgupnicpv@mail.ru
Russian Federation, Moscow
V. B. Mityukhlyaev
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Email: fgupnicpv@mail.ru
Russian Federation, Moscow
P. A. Todua
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV); Moscow Institute of Physics and Technology (State University)
Email: fgupnicpv@mail.ru
Russian Federation, Moscow; Dolgoprudny
M. N. Filippov
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV); Moscow Institute of Physics and Technology (State University); Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IGIC RAS)
Email: fgupnicpv@mail.ru
Russian Federation, Moscow; Dolgoprudny; Moscow
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