Email this article Analysis of Factors Affecting the Accuracy of Three-Dimensional Reconstruction of the Surface of Objects with Submicrometer Relief Obtained by Scanning Electron Microscope Stereo Images
- Authors: Kuzin A.Y.1, Vasil’ev A.L.2,3, Mityukhlyaev V.B.4, Mikhutkin A.A.2, Todua P.A.4,5, Filippov M.N.4,5
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Affiliations:
- All-Russia Research Institute of Metrological Service (VNIIMS)
- National Research Center Kurchatov Institute
- Institute of Crystallography, Russian Academy of Sciences
- Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
- Moscow Institute of Physics and Technology (State University)
- Issue: Vol 59, No 3 (2016)
- Pages: 230-234
- Section: Article
- URL: https://journals.rcsi.science/0543-1972/article/view/245782
- DOI: https://doi.org/10.1007/s11018-016-0948-7
- ID: 245782
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Abstract
We present analysis results of factors influencing the systematic error in 3-D reconstruction of surface reliefs based on stereo images obtained using the scanning electron microscope S-4800. The typical size for the surface relief elements is less than 1 μm. The main sources of the error are found. It is shown that for typical samples the main factor influencing the systematic error of 3-D reconstruction is the parallax measurement error.
About the authors
A. Yu. Kuzin
All-Russia Research Institute of Metrological Service (VNIIMS)
Email: fgupnicpv@mail.ru
Russian Federation, Moscow
A. L. Vasil’ev
National Research Center Kurchatov Institute; Institute of Crystallography, Russian Academy of Sciences
Email: fgupnicpv@mail.ru
Russian Federation, Moscow; Moscow
V. B. Mityukhlyaev
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Email: fgupnicpv@mail.ru
Russian Federation, Moscow
A. A. Mikhutkin
National Research Center Kurchatov Institute
Email: fgupnicpv@mail.ru
Russian Federation, Moscow
P. A. Todua
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV); Moscow Institute of Physics and Technology (State University)
Author for correspondence.
Email: fgupnicpv@mail.ru
Russian Federation, Moscow; Dolgoprudny, Moscow Oblast
M. N. Filippov
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV); Moscow Institute of Physics and Technology (State University)
Email: fgupnicpv@mail.ru
Russian Federation, Moscow; Dolgoprudny, Moscow Oblast
