Method of Processing Quartz Accessories in the Manufacturing of the Structures of Micro- and Nanoelectronics

T. A. Ismailov; T. É. Sarkarov; A. R. Shakhmaeva; B. A. Shangereeva

doi:10.1007/s10717-019-00118-1

Method of Processing Quartz Accessories in the Manufacturing of the Structures of Micro- and Nanoelectronics

Autores: Ismailov T.A.¹, Sarkarov T.É.¹, Shakhmaeva A.R.¹, Shangereeva B.A.¹
Afiliações:
1. Dagestan State Technical University
Edição: Volume 75, Nº 11-12 (2019)
Páginas: 488-490
Seção: At Enterprises and Institutes
URL: https://journals.rcsi.science/0361-7610/article/view/245125
DOI: https://doi.org/10.1007/s10717-019-00118-1
ID: 245125

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The effect of different methods of processing quartz accessories for the purpose of completely removing hardly soluble films of borosilicate and phosphosilicate glasses is investigated. It is shown that the methods developed for processing quartz accessories make it possible to increase cleaning efficiency substantially. The optimal processing regimes for quartz accessories are presented.