Development and Implementation of Methods and Means for Achieving a Uniform Functional Coating Thickness
- 作者: Shishlov A.1, Sagatelyan G.2, Shashurin V.2
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隶属关系:
- NII PM im. akad. V.I. Kuznetsova, Branch of FGUP TsENKI
- Moscow Bauman State Technical University
- 期: 卷 2017, 编号 13 (2017)
- 页面: 1165-1169
- 栏目: Coating Deposition
- URL: https://journals.rcsi.science/0036-0295/article/view/171953
- DOI: https://doi.org/10.1134/S0036029517130237
- ID: 171953
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详细
A mathematical model is proposed to calculate the growth rate of the thin-film coating thickness at various points in a flat substrate surface during planetary motion of the substrate, which makes it possible to calculate an expected coating thickness distribution. Proper software package is developed. The coefficients used for computer simulation are experimentally determined.
作者简介
A. Shishlov
NII PM im. akad. V.I. Kuznetsova, Branch of FGUP TsENKI
Email: h_sagatelyan@mail.ru
俄罗斯联邦, Moscow
G. Sagatelyan
Moscow Bauman State Technical University
编辑信件的主要联系方式.
Email: h_sagatelyan@mail.ru
俄罗斯联邦, Moscow
V. Shashurin
Moscow Bauman State Technical University
Email: h_sagatelyan@mail.ru
俄罗斯联邦, Moscow
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