Development and Implementation of Methods and Means for Achieving a Uniform Functional Coating Thickness
- Авторы: Shishlov A.1, Sagatelyan G.2, Shashurin V.2
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Учреждения:
- NII PM im. akad. V.I. Kuznetsova, Branch of FGUP TsENKI
- Moscow Bauman State Technical University
- Выпуск: Том 2017, № 13 (2017)
- Страницы: 1165-1169
- Раздел: Coating Deposition
- URL: https://journals.rcsi.science/0036-0295/article/view/171953
- DOI: https://doi.org/10.1134/S0036029517130237
- ID: 171953
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Аннотация
A mathematical model is proposed to calculate the growth rate of the thin-film coating thickness at various points in a flat substrate surface during planetary motion of the substrate, which makes it possible to calculate an expected coating thickness distribution. Proper software package is developed. The coefficients used for computer simulation are experimentally determined.
Об авторах
A. Shishlov
NII PM im. akad. V.I. Kuznetsova, Branch of FGUP TsENKI
Email: h_sagatelyan@mail.ru
Россия, Moscow
G. Sagatelyan
Moscow Bauman State Technical University
Автор, ответственный за переписку.
Email: h_sagatelyan@mail.ru
Россия, Moscow
V. Shashurin
Moscow Bauman State Technical University
Email: h_sagatelyan@mail.ru
Россия, Moscow