Development and Implementation of Methods and Means for Achieving a Uniform Functional Coating Thickness
- Авторлар: Shishlov A.1, Sagatelyan G.2, Shashurin V.2
-
Мекемелер:
- NII PM im. akad. V.I. Kuznetsova, Branch of FGUP TsENKI
- Moscow Bauman State Technical University
- Шығарылым: Том 2017, № 13 (2017)
- Беттер: 1165-1169
- Бөлім: Coating Deposition
- URL: https://journals.rcsi.science/0036-0295/article/view/171953
- DOI: https://doi.org/10.1134/S0036029517130237
- ID: 171953
Дәйексөз келтіру
Аннотация
A mathematical model is proposed to calculate the growth rate of the thin-film coating thickness at various points in a flat substrate surface during planetary motion of the substrate, which makes it possible to calculate an expected coating thickness distribution. Proper software package is developed. The coefficients used for computer simulation are experimentally determined.
Авторлар туралы
A. Shishlov
NII PM im. akad. V.I. Kuznetsova, Branch of FGUP TsENKI
Email: h_sagatelyan@mail.ru
Ресей, Moscow
G. Sagatelyan
Moscow Bauman State Technical University
Хат алмасуға жауапты Автор.
Email: h_sagatelyan@mail.ru
Ресей, Moscow
V. Shashurin
Moscow Bauman State Technical University
Email: h_sagatelyan@mail.ru
Ресей, Moscow
![](/img/style/loading.gif)