Email this article Development and Implementation of Methods and Means for Achieving a Uniform Functional Coating Thickness
- Authors: Shishlov A.V.1, Sagatelyan G.R.2, Shashurin V.D.2
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Affiliations:
- NII PM im. akad. V.I. Kuznetsova, Branch of FGUP TsENKI
- Moscow Bauman State Technical University
- Issue: Vol 2017, No 13 (2017)
- Pages: 1165-1169
- Section: Coating Deposition
- URL: https://journals.rcsi.science/0036-0295/article/view/171953
- DOI: https://doi.org/10.1134/S0036029517130237
- ID: 171953
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Abstract
A mathematical model is proposed to calculate the growth rate of the thin-film coating thickness at various points in a flat substrate surface during planetary motion of the substrate, which makes it possible to calculate an expected coating thickness distribution. Proper software package is developed. The coefficients used for computer simulation are experimentally determined.
About the authors
A. V. Shishlov
NII PM im. akad. V.I. Kuznetsova, Branch of FGUP TsENKI
Email: h_sagatelyan@mail.ru
Russian Federation, Moscow
G. R. Sagatelyan
Moscow Bauman State Technical University
Author for correspondence.
Email: h_sagatelyan@mail.ru
Russian Federation, Moscow
V. D. Shashurin
Moscow Bauman State Technical University
Email: h_sagatelyan@mail.ru
Russian Federation, Moscow
