Magnetron deposition of barium hexaferrite films from a target of stoichiometric composition

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A technique has been proposed for obtaining films of barium hexaferrite on sapphire with the (0001) orientation using the high-frequency magnetron sputtering of a stoichiometric BaFe12O19 target followed by annealing The performed X-ray diffraction analysis and Raman spectrometry showed the possibility the possibility of crystallization of oriented films without using correction of the target composition.

作者简介

V. Luzanov

Kotelnikov Institute of Radioengineering and Electronics, Russian Academy of Sciences, Fryazino Branch

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Email: valery@luzanov.ru
Fryazino, Moscow oblast, 141190 Russia

参考

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