Email this article Magnetron deposition of barium hexaferrite films from a target of stoichiometric composition
- Authors: Luzanov V.A.1
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Affiliations:
- Kotelnikov Institute of Radioengineering and Electronics, Russian Academy of Sciences, Fryazino Branch
- Issue: Vol 68, No 9 (2023)
- Pages: 921-923
- Section: К 70-ЛЕТИЮ ИРЭ ИМ. В.А. КОТЕЛЬНИКОВА РАН
- URL: https://journals.rcsi.science/0033-8494/article/view/138433
- DOI: https://doi.org/10.31857/S0033849423090176
- EDN: https://elibrary.ru/RGKOWT
- ID: 138433
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Abstract
A technique has been proposed for obtaining films of barium hexaferrite on sapphire with the (0001) orientation using the high-frequency magnetron sputtering of a stoichiometric BaFe12O19 target followed by annealing The performed X-ray diffraction analysis and Raman spectrometry showed the possibility the possibility of crystallization of oriented films without using correction of the target composition.
About the authors
V. A. Luzanov
Kotelnikov Institute of Radioengineering and Electronics, Russian Academy of Sciences, Fryazino Branch
Author for correspondence.
Email: valery@luzanov.ru
Fryazino, Moscow oblast, 141190 Russia
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