电邮这篇文章 Preparation of Single-Crystal Zinc Oxide Films on a Metal Sublayer
- 作者: Luzanov V.1
-
隶属关系:
- Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch
- 期: 卷 68, 编号 5 (2023)
- 页面: 470-471
- 栏目: НАНОЭЛЕКТРОНИКА
- URL: https://journals.rcsi.science/0033-8494/article/view/138244
- DOI: https://doi.org/10.31857/S0033849423050108
- EDN: https://elibrary.ru/UHVBOK
- ID: 138244
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详细
To increase the efficiency of devices based on piezoelectric transducers made of zinc oxide, it is proposed to use single-crystal layers of platinum as the bottom electrode. Epitaxial single-crystal films of zinc oxide on metal have been obtained. It is shown that this combination of layers makes it possible to minimizethe mismatch in the lattice parameters of the film and substrate, which significantly improves the quality of the obtained piezoelectric film.
作者简介
V. Luzanov
Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch
编辑信件的主要联系方式.
Email: valery@luzanov.ru
Fryazino, Moscow oblast, 141190 Russia
参考
- Лузанов В.А., Алексеев С.Г., Ползикова Н.И. // РЭ. 2018. Т. 63. № 9. С. 1015.
- Morales C., Leinen D., del Campo A. et al. // J. Alloys and Compounds. 2021. V. 884. Article No. 161056.
- Franklin J.B., Zou B., Petrov P. et al. // J. Material Chemistry. 2021. V. 21. № 22. P. 8178.
- Steiger P., Zhang J., Harrabi K. et al. // Thin Solid Films. 2018. V. 645. P. 417.
