Preparation of Single-Crystal Zinc Oxide Films on a Metal Sublayer

V. A. Luzanov; Лузанов В. А.

doi:10.31857/S0033849423050108

Preparation of Single-Crystal Zinc Oxide Films on a Metal Sublayer

Autores: Luzanov V.¹
Afiliações:
1. Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch
Edição: Volume 68, Nº 5 (2023)
Páginas: 470-471
Seção: НАНОЭЛЕКТРОНИКА
URL: https://journals.rcsi.science/0033-8494/article/view/138244
DOI: https://doi.org/10.31857/S0033849423050108
EDN: https://elibrary.ru/UHVBOK
ID: 138244

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Resumo
Sobre autores
Bibliografia
Arquivos suplementares
Estatísticas

Resumo

To increase the efficiency of devices based on piezoelectric transducers made of zinc oxide, it is proposed to use single-crystal layers of platinum as the bottom electrode. Epitaxial single-crystal films of zinc oxide on metal have been obtained. It is shown that this combination of layers makes it possible to minimizethe mismatch in the lattice parameters of the film and substrate, which significantly improves the quality of the obtained piezoelectric film.

Palavras-chave

piezoelectric transducer, zinc oxide, epitaxial single-crystal film

Sobre autores

V. Luzanov

Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch

Autor responsável pela correspondência
Email: valery@luzanov.ru
Fryazino, Moscow oblast, 141190 Russia

Bibliografia

Лузанов В.А., Алексеев С.Г., Ползикова Н.И. // РЭ. 2018. Т. 63. № 9. С. 1015.
Morales C., Leinen D., del Campo A. et al. // J. Alloys and Compounds. 2021. V. 884. Article No. 161056.
Franklin J.B., Zou B., Petrov P. et al. // J. Material Chemistry. 2021. V. 21. № 22. P. 8178.
Steiger P., Zhang J., Harrabi K. et al. // Thin Solid Films. 2018. V. 645. P. 417.