Improving the Accuracy of Broad-Band Monitoring of Optical Coating Deposition

T. F. Isaev; I. V. Kochikov; D. V. Lukyanenko; A. V. Tikhonravov; A. G. Yagola

doi:10.3103/S0027134918040070

Improving the Accuracy of Broad-Band Monitoring of Optical Coating Deposition

作者: Isaev T.F.¹, Kochikov I.V.², Lukyanenko D.V.¹, Tikhonravov A.V.², Yagola A.G.¹
隶属关系:
1. Department of Physics
2. Research Computer Center
期: 卷 73, 编号 4 (2018)
页面: 382-387
栏目: Optics and Spectroscopy. Laser Physics
URL: https://journals.rcsi.science/0027-1349/article/view/165021
DOI: https://doi.org/10.3103/S0027134918040070
ID: 165021

如何引用文章

全文:

开放存取

##reader.subscriptionAccessGranted##
受限制的访问

订阅存取

详细
作者简介
参考
补充文件
统计

详细

A method for improving the accuracy of the broad-band monitoring of the process of depositing optical coatings is proposed. The method is based on determining the actual set of thicknesses of deposited layers in the deposition process. The effectiveness of the proposed approach is demonstrated in a series of model numerical experiments using a simulator of deposition process.