Email this article Improving the Accuracy of Broad-Band Monitoring of Optical Coating Deposition
- Authors: Isaev T.F.1, Kochikov I.V.2, Lukyanenko D.V.1, Tikhonravov A.V.2, Yagola A.G.1
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Affiliations:
- Department of Physics
- Research Computer Center
- Issue: Vol 73, No 4 (2018)
- Pages: 382-387
- Section: Optics and Spectroscopy. Laser Physics
- URL: https://journals.rcsi.science/0027-1349/article/view/165021
- DOI: https://doi.org/10.3103/S0027134918040070
- ID: 165021
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Abstract
A method for improving the accuracy of the broad-band monitoring of the process of depositing optical coatings is proposed. The method is based on determining the actual set of thicknesses of deposited layers in the deposition process. The effectiveness of the proposed approach is demonstrated in a series of model numerical experiments using a simulator of deposition process.
About the authors
T. F. Isaev
Department of Physics
Author for correspondence.
Email: temurisaev@gmail.com
Russian Federation, Moscow, 119991
I. V. Kochikov
Research Computer Center
Email: temurisaev@gmail.com
Russian Federation, Moscow, 119991
D. V. Lukyanenko
Department of Physics
Email: temurisaev@gmail.com
Russian Federation, Moscow, 119991
A. V. Tikhonravov
Research Computer Center
Email: temurisaev@gmail.com
Russian Federation, Moscow, 119991
A. G. Yagola
Department of Physics
Email: temurisaev@gmail.com
Russian Federation, Moscow, 119991
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