Отправить статью по E-mail Improving the Accuracy of Broad-Band Monitoring of Optical Coating Deposition
- Авторы: Isaev T.F.1, Kochikov I.V.2, Lukyanenko D.V.1, Tikhonravov A.V.2, Yagola A.G.1
-
Учреждения:
- Department of Physics
- Research Computer Center
- Выпуск: Том 73, № 4 (2018)
- Страницы: 382-387
- Раздел: Optics and Spectroscopy. Laser Physics
- URL: https://journals.rcsi.science/0027-1349/article/view/165021
- DOI: https://doi.org/10.3103/S0027134918040070
- ID: 165021
Цитировать
Открытый доступ
Доступ предоставлен
Только для подписчиков
Аннотация
A method for improving the accuracy of the broad-band monitoring of the process of depositing optical coatings is proposed. The method is based on determining the actual set of thicknesses of deposited layers in the deposition process. The effectiveness of the proposed approach is demonstrated in a series of model numerical experiments using a simulator of deposition process.
Об авторах
T. Isaev
Department of Physics
Автор, ответственный за переписку.
Email: temurisaev@gmail.com
Россия, Moscow, 119991
I. Kochikov
Research Computer Center
Email: temurisaev@gmail.com
Россия, Moscow, 119991
D. Lukyanenko
Department of Physics
Email: temurisaev@gmail.com
Россия, Moscow, 119991
A. Tikhonravov
Research Computer Center
Email: temurisaev@gmail.com
Россия, Moscow, 119991
A. Yagola
Department of Physics
Email: temurisaev@gmail.com
Россия, Moscow, 119991
Дополнительные файлы
