Deposition of Coatings Under Pulsed Action of Glow Discharge

V. I. Yurshev; A. I. Serdyuk; R. I. Mukatdarov; I. V. Yurshev

doi:10.1007/s11041-018-0203-8

Deposition of Coatings Under Pulsed Action of Glow Discharge

作者: Yurshev V.I.¹, Serdyuk A.I.¹, Mukatdarov R.I.¹, Yurshev I.V.²
隶属关系:
1. Orenburg State University
2. “Tekhnopark OGU”
期: 卷 59, 编号 9-10 (2018)
页面: 637-640
栏目: Article
URL: https://journals.rcsi.science/0026-0673/article/view/236201
DOI: https://doi.org/10.1007/s11041-018-0203-8
ID: 236201

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The microstructure of coatings deposited under radiation heating in vacuum at different parameters of pulsed glow discharge is studied. It is shown that depending on the length of the pulses of the glow discharge the deposited coatings may have alternating different-thickness chromium carbide layers.