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A Study on the Process of Plasma-Enhanced Chemical Vapor Deposition of (AlxGa1 – x)2O3 Thin Films
Mochalov L.A., Kudryashov M.A., Prokhorov I.O., Vshivtsev M.A., Kudryashova Y.P., Knyazev A.V.
Investigation of the Plasma-Chemical Synthesis of Thin Ga2O3 Films Doped with Zn in One Step in Plasma
Mochalov L.A., Kudryashov M.A., Prokhorov I.O., Vshivtsev M.A., Kudryashova Y.P., Slapovskaya E.A., Knyazev A.V.
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