Synthesis of Zirconium Diboride Films and ZrB2/BCxNy Heterostructures

Abstract

Using mechanochemical synthesis, we have prepared zirconium borohydride, Zr(BH₄)₄, as a precursor for ZrB₂ film growth by chemical vapor deposition. We have carried out the thermodynamic modeling of phase formation processes in the Zr–B–(N)–H and Zr–B–(N)–H–O systems in a wide temperature range, from 100 to 2500°C, at various p_(H2)/p_(Zr(BH4)4) and p_(NH3)/p_(Zr(BH4)4) partial pressure ratios in the starting gas mixtures. A process has been proposed for the growth of zirconium diboride films by Zr(BH₄)₄ decomposition using two techniques: chemical vapor deposition and plasma-enhanced chemical vapor deposition. We also developed a process for the growth of multilayer ZrB₂-and BC_xN_y-based structures.