Synthesis of Zirconium Diboride Films and ZrB2/BCxNy Heterostructures


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Using mechanochemical synthesis, we have prepared zirconium borohydride, Zr(BH4)4, as a precursor for ZrB2 film growth by chemical vapor deposition. We have carried out the thermodynamic modeling of phase formation processes in the Zr–B–(N)–H and Zr–B–(N)–H–O systems in a wide temperature range, from 100 to 2500°C, at various p(H2)/p(Zr(BH4)4) and p(NH3)/p(Zr(BH4)4) partial pressure ratios in the starting gas mixtures. A process has been proposed for the growth of zirconium diboride films by Zr(BH4)4 decomposition using two techniques: chemical vapor deposition and plasma-enhanced chemical vapor deposition. We also developed a process for the growth of multilayer ZrB2-and BCxNy-based structures.

作者简介

V. Sulyaeva

Nikolaev Institute of Inorganic Chemistry, Siberian Branch

编辑信件的主要联系方式.
Email: veronica@niic.nsc.ru
俄罗斯联邦, pr. Akademika Lavrent’eva 3, Novosibirsk, 630090

V. Shestakov

Nikolaev Institute of Inorganic Chemistry, Siberian Branch

Email: veronica@niic.nsc.ru
俄罗斯联邦, pr. Akademika Lavrent’eva 3, Novosibirsk, 630090

Yu. Rumyantsev

Nikolaev Institute of Inorganic Chemistry, Siberian Branch

Email: veronica@niic.nsc.ru
俄罗斯联邦, pr. Akademika Lavrent’eva 3, Novosibirsk, 630090

M. Kosinova

Nikolaev Institute of Inorganic Chemistry, Siberian Branch

Email: veronica@niic.nsc.ru
俄罗斯联邦, pr. Akademika Lavrent’eva 3, Novosibirsk, 630090

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