Metalorganic vapour phase epitaxy of GaAs/AlGaAs nanoheterostructures for a quantum cascade laser

详细

Short-period GaAs/AlGaAs superlattices, an active region, and a quantum cascade laser heterostructure have been grown by metalorganic vapor phase epitaxy, and their characteristics have been studied by high-resolution X-ray diffraction, transmission electron microscopy, and photoluminescence spectroscopy. The heterostructures have been used to produce quantum cascade lasers emitting near 10 μm. Their output pulse power at 77 K is above 200 mW.