Metalorganic vapour phase epitaxy of GaAs/AlGaAs nanoheterostructures for a quantum cascade laser
- Authors: Marmalyuk A.A.1,2, Padalitsa A.A.1, Ladugin M.A.1, Gorlachuk P.V.1, Yarotskaya I.V.1, Andreev A.Y.1, Bagaev T.A.1, Lobintsov A.V.1, Kurnyavko Y.V.1, Sapozhnikov S.M.1, Danilov A.I.1, Telegin K.Y.1, Simakov V.A.1, Zasavitskii I.I.2,3, Zarubin S.S.3
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Affiliations:
- AO Stel’makh Polyus Research Institute
- National Nuclear Research University MEPhI
- Lebedev Institute of Physics
- Issue: Vol 53, No 9 (2017)
- Pages: 891-895
- Section: Article
- URL: https://journals.rcsi.science/0020-1685/article/view/158280
- DOI: https://doi.org/10.1134/S0020168517090138
- ID: 158280
Cite item
Abstract
Short-period GaAs/AlGaAs superlattices, an active region, and a quantum cascade laser heterostructure have been grown by metalorganic vapor phase epitaxy, and their characteristics have been studied by high-resolution X-ray diffraction, transmission electron microscopy, and photoluminescence spectroscopy. The heterostructures have been used to produce quantum cascade lasers emitting near 10 μm. Their output pulse power at 77 K is above 200 mW.
About the authors
A. A. Marmalyuk
AO Stel’makh Polyus Research Institute; National Nuclear Research University MEPhI
Author for correspondence.
Email: almarm@mail.ru
Russian Federation, ul. Vvedenskogo 3/1, Moscow, 117342; Kashirskoe sh. 31, Moscow, 115409
A. A. Padalitsa
AO Stel’makh Polyus Research Institute
Email: almarm@mail.ru
Russian Federation, ul. Vvedenskogo 3/1, Moscow, 117342
M. A. Ladugin
AO Stel’makh Polyus Research Institute
Email: almarm@mail.ru
Russian Federation, ul. Vvedenskogo 3/1, Moscow, 117342
P. V. Gorlachuk
AO Stel’makh Polyus Research Institute
Email: almarm@mail.ru
Russian Federation, ul. Vvedenskogo 3/1, Moscow, 117342
I. V. Yarotskaya
AO Stel’makh Polyus Research Institute
Email: almarm@mail.ru
Russian Federation, ul. Vvedenskogo 3/1, Moscow, 117342
A. Yu. Andreev
AO Stel’makh Polyus Research Institute
Email: almarm@mail.ru
Russian Federation, ul. Vvedenskogo 3/1, Moscow, 117342
T. A. Bagaev
AO Stel’makh Polyus Research Institute
Email: almarm@mail.ru
Russian Federation, ul. Vvedenskogo 3/1, Moscow, 117342
A. V. Lobintsov
AO Stel’makh Polyus Research Institute
Email: almarm@mail.ru
Russian Federation, ul. Vvedenskogo 3/1, Moscow, 117342
Yu. V. Kurnyavko
AO Stel’makh Polyus Research Institute
Email: almarm@mail.ru
Russian Federation, ul. Vvedenskogo 3/1, Moscow, 117342
S. M. Sapozhnikov
AO Stel’makh Polyus Research Institute
Email: almarm@mail.ru
Russian Federation, ul. Vvedenskogo 3/1, Moscow, 117342
A. I. Danilov
AO Stel’makh Polyus Research Institute
Email: almarm@mail.ru
Russian Federation, ul. Vvedenskogo 3/1, Moscow, 117342
K. Yu. Telegin
AO Stel’makh Polyus Research Institute
Email: almarm@mail.ru
Russian Federation, ul. Vvedenskogo 3/1, Moscow, 117342
V. A. Simakov
AO Stel’makh Polyus Research Institute
Email: almarm@mail.ru
Russian Federation, ul. Vvedenskogo 3/1, Moscow, 117342
I. I. Zasavitskii
National Nuclear Research University MEPhI; Lebedev Institute of Physics
Email: almarm@mail.ru
Russian Federation, Kashirskoe sh. 31, Moscow, 115409; Leninskii pr. 53, Moscow, 119991
S. S. Zarubin
Lebedev Institute of Physics
Email: almarm@mail.ru
Russian Federation, Leninskii pr. 53, Moscow, 119991
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