Synthesis of ZnO Thin Films Doped with Ga and In: Determination of Their Composition through X-Ray Spectroscopy and Inductively Coupled Plasma Mass Spectrometry


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An approach is proposed to study the composition of synthesized thin zinc films doped with In and Ga through local X-ray spectral analysis (LXSA) and inductively coupled plasma mass spectrometry (ICP-MS). A relationship between the amount/distribution of additives in the sample and synthesis conditions on rotating substrates is found. The results of determining the dominant impurities in film solutions with ICP-MS are used to validate those obtained with the LXSA method without sample preparation. To find doping impurities at an amount less than 1 at % is possible only through the ICP-MS method.

作者简介

D. Filatova

Moscow State University

编辑信件的主要联系方式.
Email: gak1.analyt@gmail.com
俄罗斯联邦, Moscow, 119991

N. Vorobyeva

Moscow State University

Email: gak1.analyt@gmail.com
俄罗斯联邦, Moscow, 119991

M. Rumyantseva

Moscow State University

Email: gak1.analyt@gmail.com
俄罗斯联邦, Moscow, 119991

V. Baranovskaya

Kurnakov Institute of General and Inorganic Chemistry

Email: gak1.analyt@gmail.com
俄罗斯联邦, Moscow, 119991

A. Baranchikov

Kurnakov Institute of General and Inorganic Chemistry

Email: gak1.analyt@gmail.com
俄罗斯联邦, Moscow, 119991

V. Ivanov

Kurnakov Institute of General and Inorganic Chemistry

Email: gak1.analyt@gmail.com
俄罗斯联邦, Moscow, 119991

A. Gaskov

Moscow State University

Email: gak1.analyt@gmail.com
俄罗斯联邦, Moscow, 119991

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