Highly Sensitive Chromatography Mass Spectrometry Determination of Impurities in High-Purity Monogermane Using Adsorption Capillary Column with Carbon Sorbent

Abstract

It is shown that the employment of a quartz capillary column with carbon adsorbent provides an effective separation of impurities of permanent gases, carbon dioxide, nitrous oxide, C₁–C₂ hydrocarbons, and carbon dioxide in monogermane. The effect of the injected volume of monogermane specimen on the determination of ethane and carbon dioxide is studied. Chromatography mass spectrometry detection limits of impurities are (1–10) × 10^–6 mol %. The detection limit of the limiting impurity represented by ethane is decreased by the factor of seven as compared to the published data.