Modeling of radiation sensitivity of hydrogen sensors based on MISFET
- Авторлар: Podlepetsky B.I.1
-
Мекемелер:
- National Research Nuclear University “MEPhI” (Moscow Engineering Physics Institute)
- Шығарылым: Том 77, № 7 (2016)
- Беттер: 1301-1315
- Бөлім: Sensors and Systems
- URL: https://journals.rcsi.science/0005-1179/article/view/150398
- DOI: https://doi.org/10.1134/S0005117916070171
- ID: 150398
Дәйексөз келтіру
Аннотация
The paper presents the electrophysical and electrical models of hydrogen and radiation sensitivities of the integrated sensors with MISFET sensing elements based on the structure Pd–Ta2O5–SiO2–Si. The models take into account the influence of electrical circuits and modes, chip temperatures, surface-state density and radiation parameters on the hydrogen sensitivity of the sensors.
Авторлар туралы
B. Podlepetsky
National Research Nuclear University “MEPhI” (Moscow Engineering Physics Institute)
Хат алмасуға жауапты Автор.
Email: bipod45@gmail.com
Ресей, Moscow
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