Correlation between the structure, specific resistance, and optical properties of ITO films grown by CVD

详细

By means of chemical vapor deposition (CVD) in a quasi-closed space with the use of a separate vaporizer, indium and tin oxides (ITOs)/glass structures with high conductivity and transparency and a thickness of up to 3 μm are obtained; they are suitable for the manufacture of protective coatings of mirrors with a reflecting facial layer.