Email this article Correlation between the structure, specific resistance, and optical properties of ITO films grown by CVD
- Authors: Atabaev I.G.1, Khazhiev M.U.1, Zakirova S.B.1, Shermatov Z.1
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Affiliations:
- Physicotechnical Institute, Physics–Sun Scientific Production Association
- Issue: Vol 53, No 4 (2017)
- Pages: 322-325
- Section: Solar Engineering Materials Science
- URL: https://journals.rcsi.science/0003-701X/article/view/149349
- DOI: https://doi.org/10.3103/S0003701X1704003X
- ID: 149349
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Abstract
By means of chemical vapor deposition (CVD) in a quasi-closed space with the use of a separate vaporizer, indium and tin oxides (ITOs)/glass structures with high conductivity and transparency and a thickness of up to 3 μm are obtained; they are suitable for the manufacture of protective coatings of mirrors with a reflecting facial layer.
About the authors
I. G. Atabaev
Physicotechnical Institute, Physics–Sun Scientific Production Association
Author for correspondence.
Email: atvi@uzsci.net
Uzbekistan, Tashkent, 100084
M. U. Khazhiev
Physicotechnical Institute, Physics–Sun Scientific Production Association
Email: atvi@uzsci.net
Uzbekistan, Tashkent, 100084
S. B. Zakirova
Physicotechnical Institute, Physics–Sun Scientific Production Association
Email: atvi@uzsci.net
Uzbekistan, Tashkent, 100084
Z. Shermatov
Physicotechnical Institute, Physics–Sun Scientific Production Association
Email: atvi@uzsci.net
Uzbekistan, Tashkent, 100084
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