Enviar artigo por via de e-mail Correlation between the structure, specific resistance, and optical properties of ITO films grown by CVD
- Autores: Atabaev I.G.1, Khazhiev M.U.1, Zakirova S.B.1, Shermatov Z.1
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Afiliações:
- Physicotechnical Institute, Physics–Sun Scientific Production Association
- Edição: Volume 53, Nº 4 (2017)
- Páginas: 322-325
- Seção: Solar Engineering Materials Science
- URL: https://journals.rcsi.science/0003-701X/article/view/149349
- DOI: https://doi.org/10.3103/S0003701X1704003X
- ID: 149349
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Resumo
By means of chemical vapor deposition (CVD) in a quasi-closed space with the use of a separate vaporizer, indium and tin oxides (ITOs)/glass structures with high conductivity and transparency and a thickness of up to 3 μm are obtained; they are suitable for the manufacture of protective coatings of mirrors with a reflecting facial layer.
Sobre autores
I. Atabaev
Physicotechnical Institute, Physics–Sun Scientific Production Association
Autor responsável pela correspondência
Email: atvi@uzsci.net
Uzbequistão, Tashkent, 100084
M. Khazhiev
Physicotechnical Institute, Physics–Sun Scientific Production Association
Email: atvi@uzsci.net
Uzbequistão, Tashkent, 100084
S. Zakirova
Physicotechnical Institute, Physics–Sun Scientific Production Association
Email: atvi@uzsci.net
Uzbequistão, Tashkent, 100084
Z. Shermatov
Physicotechnical Institute, Physics–Sun Scientific Production Association
Email: atvi@uzsci.net
Uzbequistão, Tashkent, 100084
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