Отправить статью по E-mail Improving the Reliability of Interference Measurements by using Several Wavelengths
- Авторы: Vykhristyuk I.A.1, Kulikov R.V.1, Sysoev E.V.1
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Учреждения:
- Technological Design Institute of Scientific Instrument Engineering, Siberian Branch
- Выпуск: Том 54, № 5 (2018)
- Страницы: 477-483
- Раздел: Optical Information Technologies
- URL: https://journals.rcsi.science/8756-6990/article/view/212570
- DOI: https://doi.org/10.3103/S8756699018050084
- ID: 212570
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Аннотация
Methods are proposed to improve the reliability of interference measurements of surface nanotopography with sharp height gradients that lead to ambiguity in determining the phase of interference signals. The effect of the total measurement error on the range of multiwavelength measurements is considered. The results of field experiments demonstrating an increase in the range of measurements of nanotopography by the proposed methods in comparison with single-wavelength measurements are given.
Об авторах
I. Vykhristyuk
Technological Design Institute of Scientific Instrument Engineering, Siberian Branch
Автор, ответственный за переписку.
Email: uic@ngs.ru
Россия, ul. Russkaya 41, Novosibirsk, 630058
R. Kulikov
Technological Design Institute of Scientific Instrument Engineering, Siberian Branch
Email: uic@ngs.ru
Россия, ul. Russkaya 41, Novosibirsk, 630058
E. Sysoev
Technological Design Institute of Scientific Instrument Engineering, Siberian Branch
Email: uic@ngs.ru
Россия, ul. Russkaya 41, Novosibirsk, 630058
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