Vacuum Ultraviolet and Soft X-ray Broadband Monochromator for a Synchrotron Radiation Metrological Station

P. S. Zavertkin; D. V. Ivlyushkin; M. R. Mashkovtsev; A. D. Nikolenko; S. A. Sutormina; N. I. Chkhalo

doi:10.3103/S8756699019020018

Vacuum Ultraviolet and Soft X-ray Broadband Monochromator for a Synchrotron Radiation Metrological Station

Authors: Zavertkin P.S.¹, Ivlyushkin D.V.¹, Mashkovtsev M.R.¹, Nikolenko A.D.¹, Sutormina S.A.¹, Chkhalo N.I.²
Affiliations:
1. Budker Institute of Nuclear Physics, Siberian Branch
2. Institute for Physics of Microstructures
Issue: Vol 55, No 2 (2019)
Pages: 107-114
Section: Physical and Engineering Fundamentals of Microelectronics and Optoelectronics
URL: https://journals.rcsi.science/8756-6990/article/view/212687
DOI: https://doi.org/10.3103/S8756699019020018
ID: 212687

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Abstract

The monochromator of the Kosmos synchrotron radiation metrology station is discussed. The results of testing the monochromator in the energy range 2000–6000 eV using Si (111) crystals are presented. A spectral resolution ΔE/E = 10⁻⁴ was obtained. A technique for checking the spectral purity of the monochromatic radiation is described. It is shown that the monochromator can be used for spectroscopic measurements in the indicated energy range.