Development of Telecentric Objectives for Dimensional Inspection Systems

Abstract

Features of designing objectives telecentric in the object space are discussed. The optical layout of three telecentric objectives developed for dimensional inspection systems using the shadow projection method is presented. A method for monitoring the quality of manufacture of such objectives having small distortion (less than 0.02 %) and small non-telecentricity (less than 0.01°) is described. Comparison of experimentally obtained optical characteristics of two objectives manufactured by us and one objective manufactured by the Thorlabs company (U.S.) is carried out.