Study of the optical methods of formation of multilevel profile in the thin films of a hybrid photopolymer material based on thiol-siloxane and acrylate oligomers
- Авторы: Mironnikov N.G.1,2, Korolkov V.P.1,2, Derevyanko D.I.3, Shelkovnikov V.V.3,4
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Учреждения:
- Institute of Automation and Electrometry, Siberian Branch
- Novosibirsk State University
- N. N. Vorozhtsov Novosibirsk Institute of Organic Chemistry, Siberian Branch
- Novosibirsk State Technical University
- Выпуск: Том 53, № 5 (2017)
- Страницы: 466-473
- Раздел: Diffractive Optics
- URL: https://journals.rcsi.science/8756-6990/article/view/212234
- DOI: https://doi.org/10.3103/S8756699017050065
- ID: 212234
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Аннотация
This paper describes a study of the optical methods for fabrication of multilevel profile in the layers of a Hybrimer-TATS hybrid photopolymer material based on thiol-siloxane and acrylate oligomers. Grayscale photolithography and direct laser writing are used to form multilevel structures 3.5 and 6 μ in height, respectively. The characteristic curves and photosensitivity of the material are determined. The film preparation and treatment processes are optimized, and it is determined that addition of the stages of pre- and post-exposure significantly affects the photosensitive properties of Hybrimer-TATS. The photopolymer is promising as a structural material for the formation of microstructured optical components.
Об авторах
N. Mironnikov
Institute of Automation and Electrometry, Siberian Branch; Novosibirsk State University
Автор, ответственный за переписку.
Email: mironnikov.nikolay@gmail.com
Россия, pr. Academika Koptyuga 1, Novosibirsk, 630090; ul. Pirogova 2, Novosibirsk, 630090
V. Korolkov
Institute of Automation and Electrometry, Siberian Branch; Novosibirsk State University
Email: mironnikov.nikolay@gmail.com
Россия, pr. Academika Koptyuga 1, Novosibirsk, 630090; ul. Pirogova 2, Novosibirsk, 630090
D. Derevyanko
N. N. Vorozhtsov Novosibirsk Institute of Organic Chemistry, Siberian Branch
Email: mironnikov.nikolay@gmail.com
Россия, pr. Akademika Lavrentyeva9, Novosibirsk, 630090
V. Shelkovnikov
N. N. Vorozhtsov Novosibirsk Institute of Organic Chemistry, Siberian Branch; Novosibirsk State Technical University
Email: mironnikov.nikolay@gmail.com
Россия, pr. Akademika Lavrentyeva9, Novosibirsk, 630090; pr. Karla Marksa 20, Novosibirsk, 630073
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