Автор туралы ақпарат
Kireev, V. Yu.
| Шығарылым | Бөлім | Атауы | Файл |
| Том 12, № 7-8 (2017) | Article | Fabrication and Study of Parameters and Properties of Nanostructured Membranes for MEMS Devices | |
| Том 13, № 9-10 (2018) | Functional Nanomaterials | Study of the Effect of Laser Radiation on the Parameters of Alumina Films Formed by Atomic Layer Deposition | |
| Том 14, № 3-4 (2019) | Metrology, Standartization, and Control | INVESTIGATION OF GALLIUM NITRIDE ISLAND FILMS ON SAPPHIRE SUBSTRATES VIA SCANNING ELECTRON MICROSCOPY AND SPECTRAL ELLIPSOMETRY | |
| Том 14, № 5-6 (2019) | Functional and Construction Nanomaterials | Research of the Possibility to Obtain Structures with Nanometer Layer Thicknesses and Sharp-Cut Interfaces between Them Using Ion-Beam and Reactive Ion-Beam Deposition Processes |