Author Details

Kireev, V. Yu.

Issue	Section	Title	File
Vol 12, No 7-8 (2017)	Article	Fabrication and Study of Parameters and Properties of Nanostructured Membranes for MEMS Devices
Vol 13, No 9-10 (2018)	Functional Nanomaterials	Study of the Effect of Laser Radiation on the Parameters of Alumina Films Formed by Atomic Layer Deposition
Vol 14, No 3-4 (2019)	Metrology, Standartization, and Control	INVESTIGATION OF GALLIUM NITRIDE ISLAND FILMS ON SAPPHIRE SUBSTRATES VIA SCANNING ELECTRON MICROSCOPY AND SPECTRAL ELLIPSOMETRY
Vol 14, No 5-6 (2019)	Functional and Construction Nanomaterials	Research of the Possibility to Obtain Structures with Nanometer Layer Thicknesses and Sharp-Cut Interfaces between Them Using Ion-Beam and Reactive Ion-Beam Deposition Processes