电邮这篇文章 Fabrication and Study of Parameters and Properties of Nanostructured Membranes for MEMS Devices
- 作者: Dyuzhev N.A.1, Gusev E.E.1, Gryazneva T.A.1, Dedkova A.A.1, Dronova D.A.1, Kireev V.Y.1, Kirilenko E.P.1, Migunov D.M.1, Novikov D.V.1, Patyukov N.N.1, Presnukhina A.A.1, Bakun A.D.2, Ermakov D.S.2
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隶属关系:
- National Research University “Moscow Institute of Electronic Technology”
- National Research Nuclear University “Moscow Engineering Physics Institute”
- 期: 卷 12, 编号 7-8 (2017)
- 页面: 426-437
- 栏目: Article
- URL: https://journals.rcsi.science/2635-1676/article/view/220107
- DOI: https://doi.org/10.1134/S1995078017040073
- ID: 220107
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详细
The technology of forming blanks of nanostructured membranes for MEMS devices based on alternating Si3N4/SiO2 layers with a nanometer thickness has been developed. A comprehensive study of the structure and composition of membranes using microanalysis methods based on spectroscopic ellipsometry, scanning electron microscopy (SEM), secondary ion mass spectrometry (SIMS), Auger electron spectroscopy (AES), probe profilometry, and X-ray diffractometry is performed. The mechanical stress in silicon wafers with blanks of nanostructured membranes is experimentally determined.
作者简介
N. Dyuzhev
National Research University “Moscow Institute of Electronic Technology”
编辑信件的主要联系方式.
Email: bubbledouble@mail.ru
俄罗斯联邦, Zelenograd, Moscow, 124498
E. Gusev
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
俄罗斯联邦, Zelenograd, Moscow, 124498
T. Gryazneva
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
俄罗斯联邦, Zelenograd, Moscow, 124498
A. Dedkova
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
俄罗斯联邦, Zelenograd, Moscow, 124498
D. Dronova
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
俄罗斯联邦, Zelenograd, Moscow, 124498
V. Kireev
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
俄罗斯联邦, Zelenograd, Moscow, 124498
E. Kirilenko
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
俄罗斯联邦, Zelenograd, Moscow, 124498
D. Migunov
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
俄罗斯联邦, Zelenograd, Moscow, 124498
D. Novikov
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
俄罗斯联邦, Zelenograd, Moscow, 124498
N. Patyukov
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
俄罗斯联邦, Zelenograd, Moscow, 124498
A. Presnukhina
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
俄罗斯联邦, Zelenograd, Moscow, 124498
A. Bakun
National Research Nuclear University “Moscow Engineering Physics Institute”
Email: bubbledouble@mail.ru
俄罗斯联邦, Moscow, 115409
D. Ermakov
National Research Nuclear University “Moscow Engineering Physics Institute”
Email: bubbledouble@mail.ru
俄罗斯联邦, Moscow, 115409
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