Email this article Fabrication and Study of Parameters and Properties of Nanostructured Membranes for MEMS Devices
- Authors: Dyuzhev N.A.1, Gusev E.E.1, Gryazneva T.A.1, Dedkova A.A.1, Dronova D.A.1, Kireev V.Y.1, Kirilenko E.P.1, Migunov D.M.1, Novikov D.V.1, Patyukov N.N.1, Presnukhina A.A.1, Bakun A.D.2, Ermakov D.S.2
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Affiliations:
- National Research University “Moscow Institute of Electronic Technology”
- National Research Nuclear University “Moscow Engineering Physics Institute”
- Issue: Vol 12, No 7-8 (2017)
- Pages: 426-437
- Section: Article
- URL: https://journals.rcsi.science/2635-1676/article/view/220107
- DOI: https://doi.org/10.1134/S1995078017040073
- ID: 220107
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Abstract
The technology of forming blanks of nanostructured membranes for MEMS devices based on alternating Si3N4/SiO2 layers with a nanometer thickness has been developed. A comprehensive study of the structure and composition of membranes using microanalysis methods based on spectroscopic ellipsometry, scanning electron microscopy (SEM), secondary ion mass spectrometry (SIMS), Auger electron spectroscopy (AES), probe profilometry, and X-ray diffractometry is performed. The mechanical stress in silicon wafers with blanks of nanostructured membranes is experimentally determined.
About the authors
N. A. Dyuzhev
National Research University “Moscow Institute of Electronic Technology”
Author for correspondence.
Email: bubbledouble@mail.ru
Russian Federation, Zelenograd, Moscow, 124498
E. E. Gusev
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
Russian Federation, Zelenograd, Moscow, 124498
T. A. Gryazneva
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
Russian Federation, Zelenograd, Moscow, 124498
A. A. Dedkova
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
Russian Federation, Zelenograd, Moscow, 124498
D. A. Dronova
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
Russian Federation, Zelenograd, Moscow, 124498
V. Yu. Kireev
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
Russian Federation, Zelenograd, Moscow, 124498
E. P. Kirilenko
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
Russian Federation, Zelenograd, Moscow, 124498
D. M. Migunov
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
Russian Federation, Zelenograd, Moscow, 124498
D. V. Novikov
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
Russian Federation, Zelenograd, Moscow, 124498
N. N. Patyukov
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
Russian Federation, Zelenograd, Moscow, 124498
A. A. Presnukhina
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
Russian Federation, Zelenograd, Moscow, 124498
A. D. Bakun
National Research Nuclear University “Moscow Engineering Physics Institute”
Email: bubbledouble@mail.ru
Russian Federation, Moscow, 115409
D. S. Ermakov
National Research Nuclear University “Moscow Engineering Physics Institute”
Email: bubbledouble@mail.ru
Russian Federation, Moscow, 115409
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