Study of Nanoscale Profiling Modes of GaAs Epitaxial Structures by Focused Ion Beams
- Autores: Lisitsyn S.A.1, Balakirev S.V.1, Avilov V.I.1, Kolomiytsev A.S.1, Klimin V.S.1, Solodovnik M.S.1, Konoplev B.G.1, Ageev O.A.1
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Afiliações:
- Southern Federal University
- Edição: Volume 13, Nº 1-2 (2018)
- Páginas: 26-33
- Seção: Article
- URL: https://journals.rcsi.science/2635-1676/article/view/220347
- DOI: https://doi.org/10.1134/S199507801801007X
- ID: 220347
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Resumo
The nanoscale profiling modes of epitaxial GaAs layers are experimentally studied through focused ion beams (FIB). The regularities of the influence of ion current and single FIB exposure time on the geometric characteristics of the forming nanosized profile and the etching rate of the surface of GaAs epitaxial layers are determined. It is established that, within the range of FIB modes used, the rate of normal etching of GaAs(001) is on average an order of magnitude lower than the rate of lateral etching. It is shown that the FIB formation of structures with sizes of up to 100 nm atop the GaAs epitaxial layers necessitates the use of ion currents of up to 102 pA and single exposure times at a point from 10 to 100 μs. The results of the present work can be used in the development of technological processes for manufacturing promising elements of nanoelectronics and nanophotonics based on a combination of the FIB method and various types of growth methods.
Sobre autores
S. Lisitsyn
Southern Federal University
Autor responsável pela correspondência
Email: lisitsyn.s.a@gmail.com
Rússia, Taganrog, 347922
S. Balakirev
Southern Federal University
Email: lisitsyn.s.a@gmail.com
Rússia, Taganrog, 347922
V. Avilov
Southern Federal University
Email: lisitsyn.s.a@gmail.com
Rússia, Taganrog, 347922
A. Kolomiytsev
Southern Federal University
Email: lisitsyn.s.a@gmail.com
Rússia, Taganrog, 347922
V. Klimin
Southern Federal University
Email: lisitsyn.s.a@gmail.com
Rússia, Taganrog, 347922
M. Solodovnik
Southern Federal University
Email: lisitsyn.s.a@gmail.com
Rússia, Taganrog, 347922
B. Konoplev
Southern Federal University
Email: lisitsyn.s.a@gmail.com
Rússia, Taganrog, 347922
O. Ageev
Southern Federal University
Email: lisitsyn.s.a@gmail.com
Rússia, Taganrog, 347922
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