Study of Nanoscale Profiling Modes of GaAs Epitaxial Structures by Focused Ion Beams
- Авторлар: Lisitsyn S.A.1, Balakirev S.V.1, Avilov V.I.1, Kolomiytsev A.S.1, Klimin V.S.1, Solodovnik M.S.1, Konoplev B.G.1, Ageev O.A.1
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Мекемелер:
- Southern Federal University
- Шығарылым: Том 13, № 1-2 (2018)
- Беттер: 26-33
- Бөлім: Article
- URL: https://journals.rcsi.science/2635-1676/article/view/220347
- DOI: https://doi.org/10.1134/S199507801801007X
- ID: 220347
Дәйексөз келтіру
Аннотация
The nanoscale profiling modes of epitaxial GaAs layers are experimentally studied through focused ion beams (FIB). The regularities of the influence of ion current and single FIB exposure time on the geometric characteristics of the forming nanosized profile and the etching rate of the surface of GaAs epitaxial layers are determined. It is established that, within the range of FIB modes used, the rate of normal etching of GaAs(001) is on average an order of magnitude lower than the rate of lateral etching. It is shown that the FIB formation of structures with sizes of up to 100 nm atop the GaAs epitaxial layers necessitates the use of ion currents of up to 102 pA and single exposure times at a point from 10 to 100 μs. The results of the present work can be used in the development of technological processes for manufacturing promising elements of nanoelectronics and nanophotonics based on a combination of the FIB method and various types of growth methods.
Авторлар туралы
S. Lisitsyn
Southern Federal University
Хат алмасуға жауапты Автор.
Email: lisitsyn.s.a@gmail.com
Ресей, Taganrog, 347922
S. Balakirev
Southern Federal University
Email: lisitsyn.s.a@gmail.com
Ресей, Taganrog, 347922
V. Avilov
Southern Federal University
Email: lisitsyn.s.a@gmail.com
Ресей, Taganrog, 347922
A. Kolomiytsev
Southern Federal University
Email: lisitsyn.s.a@gmail.com
Ресей, Taganrog, 347922
V. Klimin
Southern Federal University
Email: lisitsyn.s.a@gmail.com
Ресей, Taganrog, 347922
M. Solodovnik
Southern Federal University
Email: lisitsyn.s.a@gmail.com
Ресей, Taganrog, 347922
B. Konoplev
Southern Federal University
Email: lisitsyn.s.a@gmail.com
Ресей, Taganrog, 347922
O. Ageev
Southern Federal University
Email: lisitsyn.s.a@gmail.com
Ресей, Taganrog, 347922
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