Отправить статью по E-mail Fabrication and Study of Parameters and Properties of Nanostructured Membranes for MEMS Devices
- Авторы: Dyuzhev N.A.1, Gusev E.E.1, Gryazneva T.A.1, Dedkova A.A.1, Dronova D.A.1, Kireev V.Y.1, Kirilenko E.P.1, Migunov D.M.1, Novikov D.V.1, Patyukov N.N.1, Presnukhina A.A.1, Bakun A.D.2, Ermakov D.S.2
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Учреждения:
- National Research University “Moscow Institute of Electronic Technology”
- National Research Nuclear University “Moscow Engineering Physics Institute”
- Выпуск: Том 12, № 7-8 (2017)
- Страницы: 426-437
- Раздел: Article
- URL: https://journals.rcsi.science/2635-1676/article/view/220107
- DOI: https://doi.org/10.1134/S1995078017040073
- ID: 220107
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Аннотация
The technology of forming blanks of nanostructured membranes for MEMS devices based on alternating Si3N4/SiO2 layers with a nanometer thickness has been developed. A comprehensive study of the structure and composition of membranes using microanalysis methods based on spectroscopic ellipsometry, scanning electron microscopy (SEM), secondary ion mass spectrometry (SIMS), Auger electron spectroscopy (AES), probe profilometry, and X-ray diffractometry is performed. The mechanical stress in silicon wafers with blanks of nanostructured membranes is experimentally determined.
Об авторах
N. Dyuzhev
National Research University “Moscow Institute of Electronic Technology”
Автор, ответственный за переписку.
Email: bubbledouble@mail.ru
Россия, Zelenograd, Moscow, 124498
E. Gusev
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
Россия, Zelenograd, Moscow, 124498
T. Gryazneva
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
Россия, Zelenograd, Moscow, 124498
A. Dedkova
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
Россия, Zelenograd, Moscow, 124498
D. Dronova
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
Россия, Zelenograd, Moscow, 124498
V. Kireev
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
Россия, Zelenograd, Moscow, 124498
E. Kirilenko
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
Россия, Zelenograd, Moscow, 124498
D. Migunov
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
Россия, Zelenograd, Moscow, 124498
D. Novikov
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
Россия, Zelenograd, Moscow, 124498
N. Patyukov
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
Россия, Zelenograd, Moscow, 124498
A. Presnukhina
National Research University “Moscow Institute of Electronic Technology”
Email: bubbledouble@mail.ru
Россия, Zelenograd, Moscow, 124498
A. Bakun
National Research Nuclear University “Moscow Engineering Physics Institute”
Email: bubbledouble@mail.ru
Россия, Moscow, 115409
D. Ermakov
National Research Nuclear University “Moscow Engineering Physics Institute”
Email: bubbledouble@mail.ru
Россия, Moscow, 115409
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