Reactivity of oxide matrix surface during atomic layer deposition
- 作者: Yezhovskiy Y.1
-
隶属关系:
- St. Petersburg State Technological Institute (Technical University)
- 期: 卷 7, 编号 1 (2016)
- 页面: 24-28
- 栏目: Article
- URL: https://journals.rcsi.science/2075-1133/article/view/204585
- DOI: https://doi.org/10.1134/S2075113316010068
- ID: 204585
如何引用文章
详细
On the basis of the macromolecular concept of the structure of solids and quantitative assessment of the reactivity of the surface of solids using the values of inductive constants, the possibility of the predicted synthesis of nanostructures on the surface of pre-ceramic oxide matrices is shown. The substantiation of the selected approach and the experimental results for the reaction succession of several solid oxides are presented.
作者简介
Yu. Yezhovskiy
St. Petersburg State Technological Institute (Technical University)
编辑信件的主要联系方式.
Email: office@technolog.edu.ru
俄罗斯联邦, St. Petersburg