Email this article Reactivity of oxide matrix surface during atomic layer deposition
- Authors: Yezhovskiy Y.K.1
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Affiliations:
- St. Petersburg State Technological Institute (Technical University)
- Issue: Vol 7, No 1 (2016)
- Pages: 24-28
- Section: Article
- URL: https://journals.rcsi.science/2075-1133/article/view/204585
- DOI: https://doi.org/10.1134/S2075113316010068
- ID: 204585
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Abstract
On the basis of the macromolecular concept of the structure of solids and quantitative assessment of the reactivity of the surface of solids using the values of inductive constants, the possibility of the predicted synthesis of nanostructures on the surface of pre-ceramic oxide matrices is shown. The substantiation of the selected approach and the experimental results for the reaction succession of several solid oxides are presented.
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About the authors
Yu. K. Yezhovskiy
St. Petersburg State Technological Institute (Technical University)
Author for correspondence.
Email: office@technolog.edu.ru
Russian Federation, St. Petersburg
