Improving the design of moving electrode in MEMS RR-type gyro
- 作者: Evstifeev M.1,2, Eliseev D.1,2
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隶属关系:
- Concern CSRI Elektropribor
- ITMO University
- 期: 卷 8, 编号 4 (2017)
- 页面: 279-286
- 栏目: Article
- URL: https://journals.rcsi.science/2075-1087/article/view/204214
- DOI: https://doi.org/10.1134/S2075108717040046
- ID: 204214
如何引用文章
详细
It has been demonstrated that variation in the flat shape of a MEMS gyro inertial body under inertial loads results in gap variation in capacitance transducer of sense oscillations. An algorithm for improving the design parameters of moving electrodes is proposed to keep the conversion factor of the gyro insensitive to translational vibrations directed normally to the disc plane of the inertial body, taking into account the flat shape loss.
作者简介
M. Evstifeev
Concern CSRI Elektropribor; ITMO University
编辑信件的主要联系方式.
Email: evstifeevm@mail.ru
俄罗斯联邦, St. Petersburg; St. Petersburg
D. Eliseev
Concern CSRI Elektropribor; ITMO University
Email: evstifeevm@mail.ru
俄罗斯联邦, St. Petersburg; St. Petersburg