Improving the design of moving electrode in MEMS RR-type gyro

Аннотация

It has been demonstrated that variation in the flat shape of a MEMS gyro inertial body under inertial loads results in gap variation in capacitance transducer of sense oscillations. An algorithm for improving the design parameters of moving electrodes is proposed to keep the conversion factor of the gyro insensitive to translational vibrations directed normally to the disc plane of the inertial body, taking into account the flat shape loss.