Numerical Simulation of Vapor-Phase Epitaxy with Allowance for Diffusion Processes

Abstract

We propose a heat-conduction model that takes into account the features of the heat and mass transfer during vapor-phase epitaxy on a curvilinear surface. Using the integro-interpolation method, a difference scheme is constructed and the numerical solution of the stated problem is found. The approximation and the stability of the difference scheme are investigated. Examples of the numerical computation for various materials are presented.