Crystal structure and mechanical properties of titanium nitride films synthesized by magnetron sputtering with a hot target
- 作者: Shapovalov V.1, Useinov A.2, Kravchuk K.2, Gladkikh E.2, Kozin A.1, Smirnov V.1
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隶属关系:
- Ul’yanov (Lenin) St. Petersburg State Electrotechnical University LETI
- Technological Institute for Superhard and Novel Carbon Materials
- 期: 卷 43, 编号 5 (2017)
- 页面: 477-479
- 栏目: Short Communications
- URL: https://journals.rcsi.science/1087-6596/article/view/216216
- DOI: https://doi.org/10.1134/S1087659617050157
- ID: 216216
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详细
The effect of nitrogen consumption and the discharge current density on the crystal structure of titanium nitride films synthesized by the method of reactive magnetron sputtering of a hot target at a constant current is studied by X-ray phase analysis. It is found that the phase of titanium nitride of a cubic crystal system is formed in the films. An increase in the current density leads to the texturing of the crystals parallel to the (111) plane in the films. In this case, the hardness and the modulus of normal elasticity are increased significantly.
作者简介
V. Shapovalov
Ul’yanov (Lenin) St. Petersburg State Electrotechnical University LETI
编辑信件的主要联系方式.
Email: vishapovalov@mail.ru
俄罗斯联邦, St. Petersburg, 197376
A. Useinov
Technological Institute for Superhard and Novel Carbon Materials
Email: vishapovalov@mail.ru
俄罗斯联邦, Troitsk, Moscow, 142190
K. Kravchuk
Technological Institute for Superhard and Novel Carbon Materials
Email: vishapovalov@mail.ru
俄罗斯联邦, Troitsk, Moscow, 142190
E. Gladkikh
Technological Institute for Superhard and Novel Carbon Materials
Email: vishapovalov@mail.ru
俄罗斯联邦, Troitsk, Moscow, 142190
A. Kozin
Ul’yanov (Lenin) St. Petersburg State Electrotechnical University LETI
Email: vishapovalov@mail.ru
俄罗斯联邦, St. Petersburg, 197376
V. Smirnov
Ul’yanov (Lenin) St. Petersburg State Electrotechnical University LETI
Email: vishapovalov@mail.ru
俄罗斯联邦, St. Petersburg, 197376