Field-Effect Transistor Based on Zinc Oxide Using Diffusion Technology

Abstract

Based on the technology developed by authors of the local diffusion doping of certain parts of the ZnO film of the donor (Ga) and acceptor (Li) impurities, a transparent field-effect transistor with the n-type channel was manufactured. The MgF2 films were used as a gate insulator. The field effect and the dark electrical characteristics of the structures were investigated. The field phototransistors based on these structures have been developed. The photoelectric characteristics of the field phototransistors were investigated, and the mechanism of the photoelectric amplification was proposed.