Determination of Refractive Index and Thickness of Nanosized Amorphous Carbon Films Via Visible Range Reflectance Spectra
- Авторы: Dabaghyan G.A.1, Matevosyan L.M.2, Avjyan K.E.2
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Учреждения:
- National Polytechnic University of Armenia
- Institute of Radiophysics and Electronics
- Выпуск: Том 54, № 2 (2019)
- Страницы: 185-187
- Раздел: Article
- URL: https://journals.rcsi.science/1068-3372/article/view/228870
- DOI: https://doi.org/10.3103/S1068337219020105
- ID: 228870
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Аннотация
The values of thickness and refractive index (1.92 < nf < 2.19) of amorphous nanosized carbon films obtained on a crystalline silicon substrate by a pulsed laser deposition were experimentally determined via an analysis of visible range of reflection spectra. Manufactured films can be used as single-layer anti-reflective coatings for Si and GaAs semiconductors.
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Об авторах
G. Dabaghyan
National Polytechnic University of Armenia
Email: avjyan@gmail.com
Армения, Yerevan
L. Matevosyan
Institute of Radiophysics and Electronics
Email: avjyan@gmail.com
Армения, Ashtarak
K. Avjyan
Institute of Radiophysics and Electronics
Автор, ответственный за переписку.
Email: avjyan@gmail.com
Армения, Ashtarak
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