Determination of Refractive Index and Thickness of Nanosized Amorphous Carbon Films Via Visible Range Reflectance Spectra

G. A. Dabaghyan; L. M. Matevosyan; K. E. Avjyan

doi:10.3103/S1068337219020105

Determination of Refractive Index and Thickness of Nanosized Amorphous Carbon Films Via Visible Range Reflectance Spectra

Authors: Dabaghyan G.A.¹, Matevosyan L.M.², Avjyan K.E.²
Affiliations:
1. National Polytechnic University of Armenia
2. Institute of Radiophysics and Electronics
Issue: Vol 54, No 2 (2019)
Pages: 185-187
Section: Article
URL: https://journals.rcsi.science/1068-3372/article/view/228870
DOI: https://doi.org/10.3103/S1068337219020105
ID: 228870

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Abstract

The values of thickness and refractive index (1.92 < n_f < 2.19) of amorphous nanosized carbon films obtained on a crystalline silicon substrate by a pulsed laser deposition were experimentally determined via an analysis of visible range of reflection spectra. Manufactured films can be used as single-layer anti-reflective coatings for Si and GaAs semiconductors.