Email this article Effect of the electron energy distribution on the measurement of the atom concentration by optical actinometry
- Authors: Bernatskiy A.V.1, Ochkin V.N.1, Bafoev R.N.2
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Affiliations:
- Lebedev Physical Institute
- Moscow Institute of Physics and Technology
- Issue: Vol 43, No 6 (2016)
- Pages: 195-198
- Section: Article
- URL: https://journals.rcsi.science/1068-3356/article/view/227976
- DOI: https://doi.org/10.3103/S1068335616060038
- ID: 227976
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Abstract
The oxygen and hydrogen atom concentrations in the hollow cathode discharge with water vapor additives are determined using small argon and xenon additives as optical actinometers. The problem of the rejection of measurements of the electron plasma component parameters is discussed.
About the authors
A. V. Bernatskiy
Lebedev Physical Institute
Author for correspondence.
Email: berav@sci.lebedev.ru
Russian Federation, Leninskii pr. 53, Moscow, 119991
V. N. Ochkin
Lebedev Physical Institute
Email: berav@sci.lebedev.ru
Russian Federation, Leninskii pr. 53, Moscow, 119991
R. N. Bafoev
Moscow Institute of Physics and Technology
Email: berav@sci.lebedev.ru
Russian Federation, Institutskii per. 9, Dolgoprudnyi, Moscow oblast, 141700
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