A CVD Process for Producing Atomic Current Sources Based on 63Ni
- 作者: Kharitonov I.1, Mazgunova V.2, Babain V.2, Kostylev A.2, Merkushkin A.3, Shemukhin A.4, Balakshin Y.4, Kozhemyako A.4, Kalmykov S.1, Magomedbekov E.3
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隶属关系:
- Chemical Faculty
- Khlopin Radium Institute
- Mendeleev University of Chemical Technology of Russia
- Skobeltsyn Institute of Nuclear Physics
- 期: 卷 60, 编号 2 (2018)
- 页面: 158-163
- 栏目: Article
- URL: https://journals.rcsi.science/1066-3622/article/view/224410
- DOI: https://doi.org/10.1134/S1066362218020054
- ID: 224410
如何引用文章
详细
A CVD process was developed for producing 63Ni-based atomic batteries by deposition of active 63Ni layers onto semiconductor silicon supports. Tetrakis(trifluorophosphine)nickel synthesized from 63Ni metal and phosphorus trifluoride was used as the volatile precursor. The influence of the support temperature and working pressure on the characteristics of the 63Ni coating was examined.
作者简介
I. Kharitonov
Chemical Faculty
Email: eldar@rctu.ru
俄罗斯联邦, Moscow
V. Mazgunova
Khlopin Radium Institute
Email: eldar@rctu.ru
俄罗斯联邦, 2-i Murinskii pr. 28, St. Petersburg, 194021
V. Babain
Khlopin Radium Institute
Email: eldar@rctu.ru
俄罗斯联邦, 2-i Murinskii pr. 28, St. Petersburg, 194021
A. Kostylev
Khlopin Radium Institute
Email: eldar@rctu.ru
俄罗斯联邦, 2-i Murinskii pr. 28, St. Petersburg, 194021
A. Merkushkin
Mendeleev University of Chemical Technology of Russia
Email: eldar@rctu.ru
俄罗斯联邦, Miusskaya pl. 9, Moscow, 125047
A. Shemukhin
Skobeltsyn Institute of Nuclear Physics
Email: eldar@rctu.ru
俄罗斯联邦, Moscow
Yu. Balakshin
Skobeltsyn Institute of Nuclear Physics
Email: eldar@rctu.ru
俄罗斯联邦, Moscow
A. Kozhemyako
Skobeltsyn Institute of Nuclear Physics
Email: eldar@rctu.ru
俄罗斯联邦, Moscow
S. Kalmykov
Chemical Faculty
Email: eldar@rctu.ru
俄罗斯联邦, Moscow
E. Magomedbekov
Mendeleev University of Chemical Technology of Russia
编辑信件的主要联系方式.
Email: eldar@rctu.ru
俄罗斯联邦, Miusskaya pl. 9, Moscow, 125047