Email this article A CVD Process for Producing Atomic Current Sources Based on 63Ni
- Authors: Kharitonov I.D.1, Mazgunova V.A.2, Babain V.A.2, Kostylev A.I.2, Merkushkin A.O.3, Shemukhin A.A.4, Balakshin Y.V.4, Kozhemyako A.V.4, Kalmykov S.N.1, Magomedbekov E.P.3
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Affiliations:
- Chemical Faculty
- Khlopin Radium Institute
- Mendeleev University of Chemical Technology of Russia
- Skobeltsyn Institute of Nuclear Physics
- Issue: Vol 60, No 2 (2018)
- Pages: 158-163
- Section: Article
- URL: https://journals.rcsi.science/1066-3622/article/view/224410
- DOI: https://doi.org/10.1134/S1066362218020054
- ID: 224410
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Abstract
A CVD process was developed for producing 63Ni-based atomic batteries by deposition of active 63Ni layers onto semiconductor silicon supports. Tetrakis(trifluorophosphine)nickel synthesized from 63Ni metal and phosphorus trifluoride was used as the volatile precursor. The influence of the support temperature and working pressure on the characteristics of the 63Ni coating was examined.
About the authors
I. D. Kharitonov
Chemical Faculty
Email: eldar@rctu.ru
Russian Federation, Moscow
V. A. Mazgunova
Khlopin Radium Institute
Email: eldar@rctu.ru
Russian Federation, 2-i Murinskii pr. 28, St. Petersburg, 194021
V. A. Babain
Khlopin Radium Institute
Email: eldar@rctu.ru
Russian Federation, 2-i Murinskii pr. 28, St. Petersburg, 194021
A. I. Kostylev
Khlopin Radium Institute
Email: eldar@rctu.ru
Russian Federation, 2-i Murinskii pr. 28, St. Petersburg, 194021
A. O. Merkushkin
Mendeleev University of Chemical Technology of Russia
Email: eldar@rctu.ru
Russian Federation, Miusskaya pl. 9, Moscow, 125047
A. A. Shemukhin
Skobeltsyn Institute of Nuclear Physics
Email: eldar@rctu.ru
Russian Federation, Moscow
Yu. V. Balakshin
Skobeltsyn Institute of Nuclear Physics
Email: eldar@rctu.ru
Russian Federation, Moscow
A. V. Kozhemyako
Skobeltsyn Institute of Nuclear Physics
Email: eldar@rctu.ru
Russian Federation, Moscow
S. N. Kalmykov
Chemical Faculty
Email: eldar@rctu.ru
Russian Federation, Moscow
E. P. Magomedbekov
Mendeleev University of Chemical Technology of Russia
Author for correspondence.
Email: eldar@rctu.ru
Russian Federation, Miusskaya pl. 9, Moscow, 125047
