Thermoelastic properties of micron-size actuators based on the Ti2NiCu//Pt composite with shape-memory effect


Дәйексөз келтіру

Толық мәтін

Ашық рұқсат Ашық рұқсат
Рұқсат жабық Рұқсат берілді
Рұқсат жабық Тек жазылушылар үшін

Аннотация

Thermomechanical properties of microactuators with shape-memory effect (SME) based on the Ti2NiCu/Pt layered composite are analyzed. Atomic-force microscopy is used to experimentally determine rigidity of the composite microactuators that represent cantilevers with sizes of 50 × 2 × 1 μm and a thickness of the SME active alloy layer of 0.5 μm in a temperature interval of 20–100°C. Forces that are exerted by the composite actuator on a microscopic object are quantitatively estimated. The experimental data are in reasonable agreement with the calculated results.

Авторлар туралы

P. Mazaev

Kotel’nikov Institute of Radio Engineering and Electronics

Email: lega_peter@list.ru
Ресей, Mokhovaya ul. 11, str. 7, Moscow, 125009

V. Koledov

Kotel’nikov Institute of Radio Engineering and Electronics

Хат алмасуға жауапты Автор.
Email: victor_koledov@mail.ru
Ресей, Mokhovaya ul. 11, str. 7, Moscow, 125009

V. Shavrov

Kotel’nikov Institute of Radio Engineering and Electronics

Email: lega_peter@list.ru
Ресей, Mokhovaya ul. 11, str. 7, Moscow, 125009

P. Lega

Kotel’nikov Institute of Radio Engineering and Electronics

Хат алмасуға жауапты Автор.
Email: lega_peter@list.ru
Ресей, Mokhovaya ul. 11, str. 7, Moscow, 125009

A. Mashirov

Kotel’nikov Institute of Radio Engineering and Electronics

Email: lega_peter@list.ru
Ресей, Mokhovaya ul. 11, str. 7, Moscow, 125009

A. Kamantsev

Kotel’nikov Institute of Radio Engineering and Electronics

Email: lega_peter@list.ru
Ресей, Mokhovaya ul. 11, str. 7, Moscow, 125009

D. Kuchin

Kotel’nikov Institute of Radio Engineering and Electronics

Email: lega_peter@list.ru
Ресей, Mokhovaya ul. 11, str. 7, Moscow, 125009

D. Kolesov

Moscow State University

Email: lega_peter@list.ru
Ресей, Moscow, 119991

I. Yaminskii

Moscow State University

Email: lega_peter@list.ru
Ресей, Moscow, 119991

D. Zakharov

National Research Technological University MISiS

Email: lega_peter@list.ru
Ресей, Leninskii pr. 4, Moscow, 119049

V. Dikan

National Research Technological University MISiS

Email: lega_peter@list.ru
Ресей, Leninskii pr. 4, Moscow, 119049

A. Irzhak

National Research Technological University MISiS; Institute of Microelectronic Technology and Ultrahigh-Purity Materials

Email: lega_peter@list.ru
Ресей, Leninskii pr. 4, Moscow, 119049; ul. Akademika Osip’yana 6, Chernogolovka, Moscow oblast, 142432


© Pleiades Publishing, Inc., 2016

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